| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3d6fa926ef6ac3947565c2d90afae18 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-17 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate |
2016-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5900eb4eaaf1e495423e65a7ccd0b3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_690def91a1e6669d7e80064498e22e0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2470939d7c48f107d29afe3c250f3da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aec41019f1da88c1196a059f39725e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_731fe37aa009c18d3ce77d45aa8afcc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec6def634465f2b4e152133e376a0714
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00eec94ccbfc3d98253d2417d5964989
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee9d29fe1b17d0c924d49bc6148703c |
| publicationDate |
2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9641154-B2 |
| titleOfInvention |
Single crystal micromechanical resonator |
| abstract |
A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11405014-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11323096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10009002-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10763000-B1 |
| priorityDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |