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filingDate 2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9638616-B2
titleOfInvention Devices and methods for gravimetric sensing in liquid environments
abstract Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.
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