| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B13-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-0208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-02 |
| filingDate |
2014-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1868fe65ccb25c9825f06d00c6179221 |
| publicationDate |
2017-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9630200-B2 |
| titleOfInvention |
Substrate treatment apparatus with elongating treatment liquid supply pipe |
| abstract |
A substrate treatment apparatus includes: a substrate holding unit which horizontally holds a substrate; a substrate rotating unit which rotates the substrate held by the substrate holding unit about a vertical axis; a treatment liquid supplying unit which supplies a treatment liquid to an upper surface of the substrate held by the substrate holding unit; an opposing member to be located in opposed spaced relation to the upper surface of the substrate held by the substrate holding unit in contact with a film of the treatment liquid formed on the upper surface of the substrate so as to receive a lift force from the liquid film; a support member which supports the opposing member; and an opposing member holding mechanism which causes the support member to hold the opposing member in a vertically relatively movable manner. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672640-B2 |
| priorityDate |
2009-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |