| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49308e8718b2bc5be941bc5b7a1d2443 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-0953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2044 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-0471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-0805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-1876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-1051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-297
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-8554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-083 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-297
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate |
2016-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_026940fac838fb6a705f95d92e788633 |
| publicationDate |
2017-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9612434-B2 |
| titleOfInvention |
Piezoelectric device including conductive layer, its manufacturing method and optical deflector |
| abstract |
A piezoelectric device includes a substrate; an insulating layer provided on the substrate; a lower electrode layer provided on the insulating layer; a piezoelectric structure provided on the lower electrode layer, the piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching the conductive layer, the conductive layer having the same crystal structure as that of the piezoelectric layers; and an upper electrode layer provided on the piezoelectric structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11679974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11665966-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021163279-A1 |
| priorityDate |
2015-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |