| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-343 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-63424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23B31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23B31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6269 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-634
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B37-00 |
| filingDate |
2014-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e44f822c764c90eefbac5b6818a611d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b4ffc7a204d72acf45794272ea1c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547169be3b25e95983293ac91e361d1a |
| publicationDate |
2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9597734-B2 |
| titleOfInvention |
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof |
| abstract |
Embodiments of the present disclosure generally provide chamber components with enhanced thermal properties and methods of enhancing thermal properties of chamber components including bonding materials. One embodiment of the present disclosure provides a method for fabricating a composite structure. The method includes applying a bonding material to a first component, and converting the bonding material applied to the first component to an enhanced bonding layer by heating the bonding material to outgas volatile species from the bonding material. The outgassed volatile species accumulates to at least 0.05% in mass of the bonding material. The method further includes contacting a second component and the enhanced bonding layer to join the first and second components. |
| priorityDate |
2010-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |