| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f56b5174f7d196258707ccf1d609796e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
2015-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9b3dd0443ec614eebf5f426ce2dbc0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae1544a8f6e2ec660d88ab065ac57e82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bd1bf00d59ecffaa3a9c0192ffacfd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d2c7d7c31ca5fb381fc99a20625484b |
| publicationDate |
2017-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9589787-B2 |
| titleOfInvention |
Manufacturing method of semiconductor device |
| abstract |
The present invention makes it possible to increase the reliability of a semiconductor device. A manufacturing method of a semiconductor device according to the present invention includes a step of removing a patterned resist film and the step of removing a patterned resist film includes the steps of: (A) introducing at least a gas containing oxygen into a processing room; (B) starting electric discharge for transforming the gas containing oxygen into plasma; and (C) introducing a water vapor or an alcohol vapor into the processing room. On this occasion, the step (C) is applied either simultaneously with or after the step (B). |
| priorityDate |
2014-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |