| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D327-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D327-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D327-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D335-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D337-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C303-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-19 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D337-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D335-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C303-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-04 |
| filingDate |
2016-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_827574d7f09ef3c9c3c1baa69f6bf575 |
| publicationDate |
2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9580402-B2 |
| titleOfInvention |
Salt, acid generator, photoresist composition, and method for producing photoresist pattern |
| abstract |
A salt represented by the formula (I): n n n n n n n n n n wherein n R 1 represents a C1 to C12 alkyl group in which a methylene group can be replaced by an oxygen atom or a carbonyl group; n Q 1 and Q 2 each independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; n A 1 represents a lactone ring-containing group which has 4 to 24 carbon atoms; n R 2 represents an acid-labile group; and n “m” represents an integer of 0 to 3. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11560355-B2 |
| priorityDate |
2015-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |