| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12d24c0a12c3ecdb6d9a47d623d96e76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_faf522b8b83eded745c73018576219ba |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0255 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-04 |
| filingDate |
2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7efb3bfcbbf9d44c010362802c798dc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0d15c07a5cb34adc4498661f98c3443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67fddd49b2170f4b5b58333350a33430
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44e0f37c085b836c7e2e255ffccc34b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_020bf2c0c3c5bb60734e014d3f3013c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d12dc51708df38a52207fe07249e900 |
| publicationDate |
2017-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9574984-B2 |
| titleOfInvention |
Particle beam forming device |
| abstract |
A particle beam forming device for forming either a linear or conical particle beam from a particle source in which particles are dispersed in a gas, includes: a reduced-pressure vessel in which pressure is reduced; a particle beam generating unit, which has one end arranged outside of the reduced-pressure vessel and an other end arranged inside the reduced-pressure vessel, and which captures the particle source from outside the reduced-pressure vessel and introduces the particle beam into the reduced-pressure vessel; and a particle beam evaluating unit for evaluating a spatial distribution of the particle beam inside the reduced-pressure vessel. |
| priorityDate |
2012-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |