http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9544986-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2e762ee864ac123f79d747ee0d3a257 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95201072723a51d96380bdb40d061b4e |
| publicationDate | 2017-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9544986-B2 |
| titleOfInvention | Extreme ultraviolet source with magnetic cusp plasma control |
| abstract | A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted within a cone-shaped sheet to an annular beam dump. |
| priorityDate | 2014-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.