| abstract |
An electrostatic chuck 10 includes a disc-shaped alumina ceramic base 12 , and a heater electrode 14 and an electrostatic electrode 16 that are embedded in the alumina ceramic base 12 . An upper surface of the alumina ceramic base 12 functions as a wafer-receiving surface 12 a . The heater electrode 14 is formed in a pattern shape, for example, in the manner of a single brush stroke so as to be arranged over the entire surface of the alumina ceramic base 12 . When a voltage is applied to the heater electrode 14 , the heater electrode 14 generates heat, and heats a wafer W. This heater electrode 14 contains TiSi 2 as a main component. |