| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a3ec8449a60f305f07adabb7a94bd09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6307e62bbc5f81c5810d78ceb37b47b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a4e2371dc324da010adb94c1220a0aaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9bf7b462a6c1905661b9ff12a6c79a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02fb7fe0b74cc32660bc0592302af3da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_92d329d363b95f78ae78871f5423810f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2011-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77cb2161cec138408afeb466c44a747b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4399d636e5a80650df6a2390562e3c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4062b8f50fe3f6d71bec4614f6f5c60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_226d058e98329bd053536bf08d1a546b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65700ef8e5f57ec754db883cc9d852e8 |
| publicationDate |
2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9506973-B2 |
| titleOfInvention |
High voltage chuck for a probe station |
| abstract |
A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016109510-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9874602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11651990-B2 |
| priorityDate |
2010-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |