Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28512 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45576 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45582 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
filingDate |
2014-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e910b7c8ac8aadb58b3aa978d1308efb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4f6f10e480bb3d7877b890f61ea8d04 |
publicationDate |
2016-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9502237-B2 |
titleOfInvention |
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium |
abstract |
Provided are a substrate processing apparatus, a method of manufacturing a semiconductor device and a non-transitory computer-readable recording medium. The substrate processing apparatus includes a process chamber configured to process a substrate; a gas supply unit including gas supply holes configured to independently supply a process gas for processing the substrate to each of a central portion of the substrate and a peripheral portion of the substrate in the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control the gas supply unit to supply the process gas to the central portion of the substrate after the process gas is supplied to the peripheral portion of the substrate through the gas supply unit. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903053-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10557198-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395900-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11554329-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10456709-B2 |
priorityDate |
2013-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |