| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02524 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 |
| filingDate |
2013-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_108f4a1781dc86183ae163fecdbd8651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9613665fb0dcc65124cf07e89d31941 |
| publicationDate |
2016-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9490121-B2 |
| titleOfInvention |
Plasma-assisted chemical gas separation method having increased plasma density and device for implementing the method |
| abstract |
The invention relates to a method and a device for coating surfaces of a substrate ( 8 ) according to the technique of plasma-assisted chemical vapor deposition. The basic idea of the present invention is to increase the ion concentration prevailing in the plasma so as to have more ions accumulate on the substrate ( 8 ) and to promote layer growth ( 12 ). According to the invention, the ion concentration is increased by forming a so-called fireball at the surface of the substrate ( 8 ) to be coated. The term fireball refers to the ionization processes that occur on electrode surfaces ( 2 ) as spontaneous small brightly luminescent phenomena in plasma processes. To this end, an electrode ( 2 ) is introduced into an existing background plasma and connected to a positive potential ( 4 ). |
| priorityDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |