http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9490106-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1b4535914e660a485ac2139ecfbaf71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a64e3bf6d135ebc1a2c7658f4baac7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_17cafdec27674b249b61eadb62cc5670 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0f9c11b69964307dbbbcd7ab9eee1d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22b8ed45b91c290337dbd89f5966ecab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ada13634b5481fda5fa3564b1c6d725 |
| publicationDate | 2016-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9490106-B2 |
| titleOfInvention | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil |
| abstract | Plasma processing chambers having internal Faraday shields with defined groove configurations, are defined. In one example, the chamber includes an electrostatic chuck for receiving a substrate and a dielectric window connected to a top portion of the chamber, where the dielectric window disposed over the electrostatic chuck. Also included is a Faraday shield disposed inside of the chamber and defined between the electrostatic chuck and the dielectric window. The Faraday shield includes an inner zone having an inner radius range, a middle zone having a middle radius range, an outer zone having an outer radius range, where the inner zone is adjacent to the middle zone, and the middle zone being adjacent to the outer zone. Further defining the Faraday shield is a first set of radial slots (A) extending through the inner zone, the middle zone, and the outer zone, a second set of radial slots (C) extending through only the outer zone; and a third set of radial slots (B) extending through the middle zone and outer zone. In this configuration, the first, second and third radial slots are arranged radially around the Faraday shield in a repeating pattern of slots A, C, B, and C. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9767996-B2 |
| priorityDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.