| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00333 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e466e57b16a82e0e21f2f000b4117d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9311f676b03e30e0388f7cab1026e0f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7cfda12052f01ff64719f9404f6be68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8438ef8baf46044afb7f7cd5a64235db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6e7515f75872e8d682a2d3d5b7b8d12 |
| publicationDate |
2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9481567-B2 |
| titleOfInvention |
MEMS structure, cap substrate and method of fabricating the same |
| abstract |
A micro electro mechanical system (MEMS) structure is provided, which includes a first substrate, a second substrate, a MEMS device and a hydrophobic semiconductor layer. The first substrate has a first portion. The second substrate is substantially parallel to the first substrate and has a second portion substantially aligned with the first portion. The MEMS device is between the first portion and the second portion. The hydrophobic semiconductor layer is made of germanium (Ge), silicon (Si) or a combination thereof on the first portion, the second portion or the first portion and the second portion and faces toward the MEMS device. A cap substrate for a MEMS device and a method of fabricating the same are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020079708-A1 |
| priorityDate |
2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |