| abstract |
A non-volatile semiconductor storage device disclosed in the embodiment has a semiconductor substrate, a first insulating film, a first charge storage film, a second insulating film, a second charge storage film, a third insulating film, and a control electrode. In this non-volatile semiconductor storage device, the first and second charge storage films comprise a metallic material, a semi-metallic material or a semiconductor material. One of the first, second, and third insulating films is a multi-layered insulating film formed by layering multiple insulating films. This non-volatile semiconductor storage device further has a film comprising of any one of an oxide film, nitride film, boride film, sulfide film, and carbide film that is in contact with one interface of the laminated insulating film and contains one type of atom selected from aluminum, boron, alkaline earth metal, and transition metal at a concentration in the range of 1E12 atoms/cm 2 to 1E16 atoms/cm 2 . |