| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-06113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10056 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 |
| filingDate |
2015-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117036b6f275b79fb9061f8dd630b61a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb8d0e141d1364d1e572e50b7142b320 |
| publicationDate |
2016-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9478019-B2 |
| titleOfInvention |
Reticle inspection using near-field recovery |
| abstract |
Systems and methods for detecting defects on a reticle are provided. The embodiments include generating and/or using a data structure that includes pairs of predetermined segments of a reticle pattern and corresponding near-field data. The near-field data for the predetermined segments may be determined by regression based on actual image(s) of a reticle generated by a detector of a reticle inspection system. Inspecting a reticle may then include separately comparing two or more segments of a pattern included in an inspection area on the reticle to the predetermined segments and assigning near-field data to at least one of the segments based on the predetermined segment to which it is most similar. The assigned near-field data can then be used to simulate an image that would be formed for the reticle by the detector, which can be compared to an actual image generated by the detector for defect detection. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11727556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10012599-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10866197-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10788748-B2 |
| priorityDate |
2014-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |