| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c549dda04afc9f9001434bffada89894
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cf0af668183c659d428c08230ec9dc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab439c43f587b998bc1fa62eb77d0db8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_859101060d54062cb05c399dffee15e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2010b8b85a10bf2c2da224aa9e02b82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9cb6677ede4d971d053b22e9e8a8165 |
| publicationDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9466528-B2 |
| titleOfInvention |
Method of making a structure |
| abstract |
A method of making a structure includes forming a first supporting member over a substrate, the first supporting member comprising a first material and having a first width defined along a reference plane. The method further includes forming a second supporting member over the substrate, the second supporting member having a second width defined along the reference plane, and the first supporting member and the second supporting member being separated by a gap region. The first width is at least 10 times the second width, and a gap width of the gap region being from 5 to 30 times the second width. |
| priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |