| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2d57af590db3add11587278aaf3b0ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_87332d12cdd2e50a610a07e6209fe2b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ca1ddb041fdc369a6f08f03bf084b87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab80e74b7c5fab7d1d6987565b8f8a32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97d59a1f8fb73d465b16bba5769d3f01 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-65 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 |
| filingDate |
2010-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5745371421ac7a2262e504585d68cb0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51ae717b198c9bb27b02285906b3eb44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94bf9211c384279030e6e33c29fdef19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f24b4610618e9746a2c75c7cacc1464 |
| publicationDate |
2016-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9448057-B2 |
| titleOfInvention |
Surface characteristic determining apparatus |
| abstract |
A wavelength selector ( 5 ) selects a wavelength of a broadband light source ( 4 ). A light director (BS 1 , BS 2 ) directs light from the wavelength selector along a measurement path towards a region of a sample surface and along a reference path towards a reference surface, such that light reflected by the region of the sample surface and light reflected by the reference surface interfere to produce an interferogram. A controller ( 20 ) controls the wavelength selector to change the wavelength selected by the wavelength selector. A recorder ( 63 ) records successive images, each image representing the interferogram produced by a respective one of the wavelengths selected by the wavelength selector. A data processor ( 18, 180 ) processes the recorded images to produce at least one of a surface profile and a surface height map of at least a part of the sample surface. The reference path may be controlled to compensate for environmental effects such as vibration, thermal effects and air turbulence. The data processor may use a graphics processing unit to enable pixel data to be processed in parallel. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11561171-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016043008-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576862-B2 |
| priorityDate |
2009-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |