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publicationDate 2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9431598-B2
titleOfInvention Sol-gel precursors and methods for making lead-based perovskite films
abstract A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications.
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