Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_205abba4c08628f0718322cc269e16e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2bde410c1889b011127dfb4526a965e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f4e139d7a98c74692c83e4f4dbb24a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c154870c3d79aa1d44cbbd5885145e04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e8cc3701ed4c4f042a7b88ebff70203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b93c8431011d15a06e1c7022db26079b |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-0973 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-8548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-1875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2042 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-078 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318 |
filingDate |
2007-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_729f6c3197cfe21f0a3e401f622c295d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e3505c0bcfcee898ac52df71baf6634 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6aca2f25a7fc1d15c5e2a72f3882eb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffa809fa3b02c7ea43a66ee352e1678b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f88747c73949cc8b3cd20a35d164efdb |
publicationDate |
2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9431598-B2 |
titleOfInvention |
Sol-gel precursors and methods for making lead-based perovskite films |
abstract |
A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications. |
priorityDate |
2006-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |