| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0a3d10ed9477633fd2c07c6da61dc49 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7854 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2013-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a190a647ff93a8c65e7654f0d186958
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42751b5b26af29663ad72faecd263b63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e5a17d29eea181228378bf87c7c5f7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_356963ec6538c200675b73342d8f63b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a16eac57f069324fa5c79009cdaf4e0 |
| publicationDate |
2016-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9391073-B2 |
| titleOfInvention |
FinFET device and method for manufacturing the same |
| abstract |
A FinFET device and a method for manufacturing the same. The FinFET device includes a plurality of fins each extending in a first direction on a substrate; a plurality of gate stacks each being disposed astride the plurality of fins and extending in a second direction; a plurality of source/drain region pairs, respective source/drain regions of each source/drain region pair being disposed on opposite sides of the each gate stack in the second direction; and a plurality of channel regions each comprising a portion of a corresponding fin between the respective source/drain regions of a corresponding source/drain pair, wherein the each fin comprises a plurality of protruding cells on opposite side surfaces in the second direction. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11323070-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825740-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11621326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10930782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11456181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10355133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018122646-A1 |
| priorityDate |
2013-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |