| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb5aed3e4f55767bd6ac4ed71a938b5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd51743f01206c09ba3ac11b69c2247c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eecde1a404f2621d62b1968f6a32a38b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2012-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7a51aa5c5a649bb0fef374b6281c011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20ed78021731edbc173cf665bba2e03c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_663ff48c2f77f5fdd4b44cdd38e8cf17 |
| publicationDate |
2016-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9390914-B2 |
| titleOfInvention |
Wet oxidation process performed on a dielectric material formed from a flowable CVD process |
| abstract |
Methods of performing a wet oxidation process on a silicon containing dielectric material filling within trenches or vias defined within a substrate are provided. In one embodiment, a method of forming a dielectric material on a substrate includes forming a dielectric material on a substrate by a flowable CVD process, curing the dielectric material disposed on the substrate, performing a wet oxidation process on the dielectric material disposed on the substrate, and forming an oxidized dielectric material on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11367613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10872762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021233764-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11133181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587783-B2 |
| priorityDate |
2009-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |