http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9377618-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-1025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N1-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N1-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-10 |
| filingDate | 2014-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57481ad703d7547036ffeaa9e8aca213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46f406a480fa081ca74170f80d3098c8 |
| publicationDate | 2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9377618-B2 |
| titleOfInvention | Electrostatic comb actuator, deformable mirror using the electrostatic comb actuator, adaptive optics system using the deformable mirror, and scanning laser ophthalmoscope using the adaptive optics system |
| abstract | Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove. |
| priorityDate | 2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.