patent/US-9372208-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9372208-B2

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2648
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
filingDate	2014-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2016-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87d1aea0af9e7910532c10aa4e4296e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60fbd08c29fe5006eaedb8d9095a529a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d9a3f77def7e911df04274d032c732 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26bd26e89fa8b59ddab24b3f28427449
publicationDate	2016-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-9372208-B2
titleOfInvention	Signal monitoring of through-wafer vias using a multi-layer inductor
abstract	According to a method herein, a multi-level inductor is created around a through-silicon-via (TSV) in a semiconductor substrate. A voltage induced in the multi-level inductor by current flowing in the TSV is sensed, using a computerized device. The voltage is compared to a reference voltage, using the computerized device. An electrical signature of the TSV is determined based on the comparing the voltage to the reference voltage, using the computerized device.
priorityDate	2014-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6291872-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7400025-B2
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123

Total number of triples: 42.