| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ce870ccd2ac38466b26e8df989f2b342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F299-0464 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F4-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F299-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2014-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa966630799fae706cd1b08d7bcc5908
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_173020b00b332e654d53de2f69be1972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_122e89032363092c4147607690193510
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11fc0710511c030d4ff9895b947e93ae |
| publicationDate |
2016-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9366960-B2 |
| titleOfInvention |
Negative resist composition, method of forming resist pattern, and complex |
| abstract |
A negative resist composition including a complex represented by the general formula (1); and a polymerization initiator. in which M represents hafnium (Hf) or zirconium (Zr), X represents a ligand including a conjugate base of an acid which has an acid dissociation constant (pKa) of 3.8 or less and has a polymerizable group, Y represents a ligand having no polymerizable group, and n represents an integer of 1 to 4.n n[MX n Y 4-n ] (1) |
| priorityDate |
2013-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |