Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_63f68c6e5e86a1c194773ba874c1e049 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0857 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0854 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-02 |
filingDate |
2013-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_388728c912a4aefeb3acdc06950ad283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d56ffa39d74ad708b3e9e66ed48ee2f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9a084b36edece1334b883ab26aa3b99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9b24b4ad972f56cdd334eefb9cedc18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a42e4f3e4d9fd3b735d7e1133a61639 |
publicationDate |
2016-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9366585-B2 |
titleOfInvention |
Device for measuring force components, and method for its production |
abstract |
A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer. |
priorityDate |
2012-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |