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publicationDate 2016-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9349915-B2
titleOfInvention β-Ga2O3-based single crystal substrate
abstract A β-Ga 2 O 3 -based single crystal substrate includes a β-Ga 2 O 3 -based single crystal. The β-Ga 2 O 3 -based single crystal includes a full width at half maximum of an x-ray rocking curve of less than 75 seconds.
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