Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55bc2bae9f65cfaede67b62128f00e9b |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-443 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P3-127 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-421 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-443 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-26 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P3-127 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-443 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26 |
filingDate |
2014-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2095141595d1786440eb16fea7afce60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40f60a995f24c37d51474b930eda8450 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7cd48d02eee02c0d020ba642eb87d75 |
publicationDate |
2016-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9345121-B2 |
titleOfInvention |
Waveguide-based apparatus for exciting and sustaining a plasma |
abstract |
An apparatus includes an electromagnetic which supports propagation of an electromagnetic wave in a first direction between a first end thereof and a second end thereof, and an electromagnetic-field shaping structure within the electromagnetic waveguide. The electromagnetic-field shaping structure defines a channel extending from a first aperture in a first wall of the apparatus to a second aperture in a second, opposite, wall. The channel has an axis extending in a second direction which is nonparallel with the first direction. The distance between the first aperture and the second aperture in the second direction is less than the width of the interior region of the waveguide at the first and second ends thereof. In some embodiments, a plasma torch is disposed within the channel. The length of the torch closely matches its interaction region. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831066-B1 |
priorityDate |
2014-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |