http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343330-B2

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filingDate 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67ca5a883400b8889226d11f780781f1
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publicationDate 2016-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9343330-B2
titleOfInvention Compositions for polishing aluminum/copper and titanium in damascene structures
abstract The invention provides a chemical-mechanical polishing composition for polishing a substrate. The polishing composition comprises an oxidizing agent, calcium ion, an organic carboxylic acid, and water, wherein the polishing composition has a pH of about 1.5 to about 7. The invention further provides a method of chemically-mechanically polishing a substrate with the aforementioned polishing composition.
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