http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9340025-B2

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filingDate 2015-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b289d4715e98923d0326a996bad76ff0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00fce0ebdc54c6c3d493266fa2328464
publicationDate 2016-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9340025-B2
titleOfInvention Method for producing liquid discharge apparatus, liquid discharge apparatus, and method for forming liquid repellent layer
abstract There is provided a method for producing a liquid discharge apparatus including a piezoelectric actuator configured to apply pressure to liquid in pressure chambers formed in a channel forming substrate. The producing method includes: forming a stacked body of an ink separation layer, piezoelectric layers, a first electrode, and second electrodes on a base member having a part to be the channel formation substrate; forming a liquid repellent layer which covers the piezoelectric layers and the second electrodes from a side opposite to the ink separation layer; and forming the pressure chambers on the base member. The liquid repellent layer is formed to have residual stress generated in the liquid repellent layer in a state that the pressure chambers are formed, the residual stress having intensity which is smaller than intensity to bend parts of the piezoelectric actuator overlapping with the pressure chambers toward the pressure chambers by 200 nm.
priorityDate 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 29.