abstract |
According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly ( 250 ), comprising the step of mounting a PCB board ( 205 ) on a metallic plate ( 206 ), mounting a MEMS device ( 240 ) on the PCB board ( 205 ), wherein the MEMS device ( 240 ) comprises a MEMS die ( 241 ) and a magnet ( 230 ). |