| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16195 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K5-066 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2014-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_944f86ead76da096fd872e5c9e028652
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce37b5c92bf568d1d9fdb5cb960c97f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca082ba1c98645abc1459d91dee364ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e82902bf4d196023bba82b5d72869f3 |
| publicationDate |
2016-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9291457-B2 |
| titleOfInvention |
Method of manufacturing electronic device, electronic device, electronic apparatus, and moving object |
| abstract |
A method of manufacturing an electronic device in which an inner space for housing a gyro element is formed between a base and a lid and the base and the lid are bonded includes bonding the base and the lid in which a groove is provided on a surface to be bonded with the base so that the inner space communicates with the outside by not bonding the inner surface of the groove to the base and to position the groove around a concave portion provided on a side surface of the base, and closing a communication portion by irradiating a laser beam to the lid in the communication portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10274365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9706673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9644962-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018087958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015116974-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015116915-A1 |
| priorityDate |
2013-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |