| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bf6f4c618f880db73dd6ae506f02bef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59a15de0fe648fa9d466ffb491329ff4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5396f70c0dda76edaf343c084da024a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a18f4049bce3793718cf7b9e92bf268c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2010-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc81ad2bc461a3990144c9ce5703e240
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae2442907b850af572320a8c0d3cd2f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_507a7b84e9c89fb24caf353d47814862 |
| publicationDate |
2016-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9273395-B2 |
| titleOfInvention |
Gas treatment systems |
| abstract |
An MOCVD reactor such as a rotating disc reactor ( 10 ) is equipped with a gas injector head having diffusers ( 129 ) disposed between adjacent gas inlets. The diffusers taper in the downstream direction. The injector head desirably has inlets ( 117 ) for a first gas such as a metal alkyl disposed in radial rows which terminate radially inward from the reactor wall to minimize deposition of the reactants on the reactor wall. The injector head desirably also has inlets ( 125 ) for a second gas such as ammonia arranged in a field between the rows of first gas inlets, and additionally has a center inlet ( 135 ) for the second gas coaxial with the axis of rotation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014116330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10017876-B2 |
| priorityDate |
2007-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |