| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2270-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05B2220-706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02P2101-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J1-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2220-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02P2101-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J2310-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02N11-0862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02C7-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02K7-1823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02C9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02C7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01D15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02C7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02P9-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J9-061 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01D15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02C7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02C7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02J9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02C7-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02C9-00 |
| filingDate |
2014-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbda43f4b0fb77f16dccea87f8d39b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc9458dedd474d0c0d32ac54b525533 |
| publicationDate |
2016-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9266716-B2 |
| titleOfInvention |
MEMS acoustic transducer with silicon nitride backplate and silicon sacrificial layer |
| abstract |
A microelectromechanical system (MEMS) microphone has a substrate including a backside trench, and a flexible membrane deposited on the substrate extending over the backside trench. The flexible membrane includes a first electrode. A silicon spacer layer is deposited on a perimeter portion of the flexible membrane. The spacer layer defines an acoustic chamber above the membrane and the backside trench. A silicon rich silicon nitride (SiN) backplate layer is deposited on top of the silicon spacer layer extending over the acoustic chamber. The backplate defines a plurality of opening into the acoustic chamber and includes a metallization that serves as a second electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11268454-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11480112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11326526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11719117-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11384696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-208148-U1 |
| priorityDate |
2013-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |