| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 |
| filingDate |
2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7941061ae69b4691e75515f0424dae0 |
| publicationDate |
2015-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9222834-B2 |
| titleOfInvention |
Inspection apparatus and method |
| abstract |
A spectroscopic scatterometer detects both zero order and higher order radiation diffracted from an illuminated spot on a target grating. The apparatus forms and detects a spectrum of zero order (reflected) radiation, and separately forms and detects a spectrum of the higher order diffracted radiation. Each spectrum is formed using a symmetrical phase grating, so as to form and detect a symmetrical pair of spectra. The pair of spectra can be averaged to obtain a single spectrum with reduced focus sensitivity. Comparing the two spectra can yield information for improving height measurements in a subsequent lithographic step. The target grating is oriented obliquely so that the zero order and higher order radiation emanate from the spot in different planes. Two scatterometers can operate simultaneously, illuminating the target from different oblique directions. A radial transmission filter reduces sidelobes in the spot and reduces product crosstalk. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11422476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11061322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10613096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10386233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021207945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11754388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9754895-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11187584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10866527-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10274370-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10060850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11281093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018080870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020004164-A1 |
| priorityDate |
2012-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |