| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa80eed27901ac84139c7a7109c21e17 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5ad9f841ec66d4038ebbf04ba584a42 |
| publicationDate |
2015-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9165768-B2 |
| titleOfInvention |
Method for deposition of silicon carbide and silicon carbide epitaxial wafer |
| abstract |
A method for deposition of silicon carbide according to an embodiment includes preparing a wafer in a susceptor; introducing first etching gas into the susceptor; introducing second etching gas into the susceptor; producing an intermediate compound by introducing a reactive raw material into the susceptor; and forming a silicon carbide epitaxial layer on the wafer by reacting the intermediate compound with the wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11752216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10017557-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10253082-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015047559-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10647753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10159715-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10188703-B2 |
| priorityDate |
2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |