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publicationDate 2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9140671-B2
titleOfInvention Quantitative sensor and manufacturing method thereof
abstract A quantitative sensor and manufacture method thereof are disclosed. This quantitative sensor has a dual-mode film bulk acoustic resonator structure to achieve desirable performances in sensitivity, accuracy and efficiency. Furthermore, this quantitative sensor serves as a fluid sensor when a fluid detection metal layer is formed in a sample-receiving chamber; and this quantitative sensor may also serve as a bio sensor when biocompatible metal layer and a bio-sensing layer are formed in the sample-receiving chamber instead of the fluid detection metal layer.
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