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publicationDate 2015-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9136120-B2
titleOfInvention Compositions for etching and methods of forming a semiconductor device using the same
abstract Etching compositions are provided. The etching composition includes a phosphoric acid, ammonium ions and a silicon compound. The silicon compound includes a silicon atom, an atomic group having an amino group combined with the silicon atom, and at least two oxygen atoms combined with the silicon atom. Methods utilizing the etching compositions are also provided.
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