| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_087d1ba21b042ab0caaf12ea04e40426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59c6a921f33fe0adc58c2b6177184515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b40acb5f8f1ec71c240366832d455e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01620dc7d58e38cf2ec6c56a620c26ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2f33954c77b8e85845b7a976ba2059a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2323-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2343-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2300-208 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G83-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2007-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38f4871162cb155dea7a1c0340fad17a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2acb3635a9dfdbdaf5bbd04253400408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b8d30d6e7b1b9fc406cb1df1c02bb18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b2ef807975846f99c78aa7d1dca154b |
| publicationDate |
2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9120952-B2 |
| titleOfInvention |
Polymeric microgels for chemical mechanical planarization (CMP) processing |
| abstract |
Organic-inorganic composites were prepared as colloidal particles of a cross-linked, thermally responsive polymer. Hybrid PNIPAM-polysiloxane particles and composite polymeric particles with embedded nanoparticles of an inorganic metal-oxide (MO x ) such as CeO2 and TiO2 were formed. To promote the incorporation of unaggregated nanoparticles, temperature responsive microspherical gels (microgels) of N-isopropylacrylamide (NIPAM) with interpenetrating (IP) linear chains of poly(acrylic acid) (PAA) were used. The organic-inorganic composition of the hybrid polymer network was controlled by changing the time for condensation and hydrolysis of the siloxane monomer during synthesis. Experimental results indicated that the planarization of silicon oxide wafers using these hybrid particles and composites exhibited lower topographical variations and surface roughness as compared to slurries consisting of only silica or ceria nanoparticles while achieving similar removal rates and better or similar frictional characteristics. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016319160-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11506979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9982166-B2 |
| priorityDate |
2006-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |