| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7fbf2dfc9692342b503c51638280856e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5902e57ebcb83a2ea40cfb1c08220920
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2727eeff4e4ea0b3bf9e961447c76ef1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14ba71eccbb5f65a22b78f39b3c6ffc3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76264 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2011-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f27c4c9aa7aedfbd16a7c92beb139a25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1234f1271730c1e058467457395f83c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_803eb1c236f4cbb333e16cf86e39425e |
| publicationDate |
2015-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9105690-B2 |
| titleOfInvention |
Process for manufacturing a semiconductor wafer having SOI-insulated wells and semiconductor wafer thereby manufactured |
| abstract |
A process for manufacturing a semiconductor wafer including SOI-insulation wells includes forming, in a die region of a semiconductor body, buried cavities and semiconductor structural elements, which traverse the buried cavities and are distributed in the die region. The process moreover includes the step of oxidizing selectively first adjacent semiconductor structural elements, arranged inside a closed region, and preventing oxidation of second semiconductor structural elements outside the closed region, so as to form a die buried dielectric layer selectively inside the closed region. |
| priorityDate |
2006-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |