| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2c321c5b9b5774498f194d959bdf9df |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-0407 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 |
| filingDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7b05a983036b0b0731ea6d81f25bddd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af3c9a31950dd9dae809538a2f16ca85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49f08b931dca13e4774c1ae030e29973 |
| publicationDate |
2015-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9088265-B2 |
| titleOfInvention |
Bulk acoustic wave resonator comprising a boron nitride piezoelectric layer |
| abstract |
A bulk acoustic wave (BAW) resonator structure comprises: a first electrode disposed over a substrate; a piezoelectric layer disposed over the first electrode, the piezoelectric layer comprising boron nitride (BN); and a second electrode disposed over the first piezoelectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11778915-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11152909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10700660-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031540-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018651-B2 |
| priorityDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |