| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664bc465362ed2841a9ecd2389acd4f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed474761832759f3aca1a49a4c05b6c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_680c93e268453489c7089340a91487ca |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00 |
| filingDate |
2012-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49f4b391f8abc584a8ee9cc4a32e522a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba3fd601dd4efd2f4101ba92c8cdb140
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8a6580a78511611c32af7aa822e06df |
| publicationDate |
2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9073172-B2 |
| titleOfInvention |
Alkaline-earth metal oxide-polymeric polishing pad |
| abstract |
The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The polishing pad includes a polymeric matrix, the polymeric matrix having a polishing surface. In addition, polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. The polymeric microelements have an outer surface and being fluid-filled for creating texture at the polishing surface. And alkaline-earth metal oxide-containing regions are distributed within each of the polymeric microelements and spaced to coat less than 50 percent of the outer surface of the polymeric microelements. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11524390-B2 |
| priorityDate |
2012-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |