| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F17-5068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-39 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-41835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70508
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B13-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-36 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50 |
| filingDate |
2013-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4a95a59c869dfba13618fed26a755d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ee5256e2685ab8a25517459d9bb0e82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a85e964a9a219968e9c230195039a334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_671aa5d85cc3868c84671fd271c6686d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ec53707d57d781db438c57bd3a7e497 |
| publicationDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9070622-B2 |
| titleOfInvention |
Systems and methods for similarity-based semiconductor process control |
| abstract |
The present disclosure provides methods and systems for providing a similarity index in semiconductor process control. One of the methods disclosed herein is a method for semiconductor fabrication process control. The method includes steps of receiving a first semiconductor device wafer and receiving a second semiconductor device wafer. The method also includes a step of collecting metrology data from the first and second semiconductor device wafers. The metrology data includes a first set of vectors associated with the first semiconductor device wafer and a second set of vectors associated with the second semiconductor device wafer. The method includes determining a similarity index based in part on a similarity index value between a first vector from the first set of vectors and a second vector from the second set of vectors and continuing to process additional wafers under current parameters when the similarity index is above a threshold value. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11099487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11302545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10151706-B1 |
| priorityDate |
2013-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |