Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a62555ff12316a9a118542896b4c0af7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02595 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02488 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2013-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f450384ba4a5a81e9052a85087bea3e7 |
publicationDate |
2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9064703-B2 |
titleOfInvention |
Low temperature polysilicon film, thin film transistor, manufacturing method thereof and display panel |
abstract |
A low temperature polysilicon film and a manufacturing method thereof, a thin film transistor and a manufacturing method thereof and a display panel are provided. The manufacturing method of the low temperature polysilicon film includes crystallizing a nano-silicon thin film to form the low temperature polysilicon film. |
priorityDate |
2013-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |