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filingDate 2012-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47c960d8ead30d2e5b9501ced2b2e1b9
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publicationDate 2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9059299-B2
titleOfInvention Method for producing high-performing and electrically stable semi-conductive metal oxide layers, layers produced according to the method and use thereof
abstract The present invention relates to a method for producing a semi-conductor laminate comprising a first and a second metal oxide layer as well as a dielectric layer, wherein the first metal oxide layer is arranged between the second metal oxide layer and the dielectric layer. The first and second metal oxide layers are formed accordingly from a first and a second liquid phase. The present invention also relates to a semi-conductor laminate that can be obtained from such a method, and to electronic components comprising such a semi-conductor laminate.
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