| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_511adc92d644031ffe0a2ff46351e3e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_796f50c9effafd53868026deddb20b50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee05300e815426dd8e82955ae3f5546a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6ef7d32a3c52c78ab851d9374d9214a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c3525d885172189a6959b51aa6ee501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0430c46c124dc663664d00922d788ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_546587ca6e2994463ccf4f7bed9eaf9d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05009 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_beadbaac2314ddf03cff853abb4d96c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2b233d61c75f3e2f74182c6785246d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ab8cb6192eceff41f84532e89da8ee4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5192ba155b4de6c106f69e9046b0f39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95f8600ee6f3ff4270059ffd6b90a219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c1cddd2a3bf2e3822982dfbb87c6cf7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fcf64bd0be77b88539feb7e4029e5d5 |
| publicationDate |
2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9059262-B2 |
| titleOfInvention |
Integrated circuits including conductive structures through a substrate and methods of making the same |
| abstract |
An integrated circuit includes a substrate having a first surface and a second surface. At least one conductive structure continuously extends through the substrate. At least one sidewall of the at least one conductive structure is spaced from a sidewall of the substrate by an air gap. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9728506-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020043785-A1 |
| priorityDate |
2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |