| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24975 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2013-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec3b68294e9bf0ec6faa5a3cfaf82909
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_247f981f4a8a6d34390220f2185eebae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc8c3c98fc1a8c81f9900b30ce154e6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b15e17a836560f15336e3dbe5dfff562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06f1c3928199f25273afa0b30bb5787d |
| publicationDate |
2015-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9053979-B2 |
| titleOfInvention |
Oxide thin film, methods of manufacturing oxide thin film and electronic devices including oxide thin film |
| abstract |
Oxide thin film, electronic devices including the oxide thin film and methods of manufacturing the oxide thin film, the methods including (A) applying an oxide precursor solution comprising at least one of zinc (Zn), indium (In) and tin (Sn) on a substrate, (B) heat-treating the oxide precursor solution to form an oxide layer, and (C) repeating the steps (A) and (B) to form a plurality of the oxide layers. |
| priorityDate |
2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |