| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75b765b53e6651e9863a3a35e4c1e164 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-193
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-084 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-193
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-04 |
| filingDate |
2013-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edcf5af9135b1c90bc727f0e2d75aebc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5443ca0322ca593189f45bf38477ffcd |
| publicationDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9048427-B2 |
| titleOfInvention |
Thin film fabrication of rubber material with piezoelectric characteristics |
| abstract |
The present invention is related to a thin film fabrication of a rubber material with piezoelectric characteristics and a manufacturing method thereof. The present invention is developed by utilizing polymer casting, multilayer stacking, surface coating, and micro plasma discharge processes. To realize the desired electromechanical sensitivity, cellular PDMS structures with micrometer-sized voids are implanted with bipolar charges on the opposite inner surfaces. The implanted charge pairs function as dipoles, which respond promptly to diverse electromechanical simulation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018283966-A1 |
| priorityDate |
2013-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |