| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_554cc0f02945fb19f1f6baca3b92cece
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f47985b7c371b565f319708450999686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7d8e7e96909ba9e17600defe43c50e1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-112 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0018 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_226e5d4cc19730504754a2b92efa85df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd9fbd8ee8804a18f00711aedba18f5 |
| publicationDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9045328-B2 |
| titleOfInvention |
Method for wafer-level surface micromachining to reduce stiction |
| abstract |
An array of microbumps with a layer or coating of non-superhydrophobic material yields a superhydrophobic surface, and may also have a contact angle hysteresis of 15 degrees or less. A surface with such an array may therefore be rendered superhydrophobic even though the surface structure and materials are not, by themselves, superhydrophobic. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10818936-B2 |
| priorityDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |