| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74d375ed3bef5b2c211fd712dede4885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f256aa2a27966ededb8ec56e318396d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3373b7ca74c39ad56cb8ce8037de33c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f509cd5d5f527c760f5f15b2d68e472 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12 |
| filingDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2433de3e4d28d3ad46955ac27b62b5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41155287f977196821f73bfe96907d64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d242a7785d9967677e4139fa5a5b15e |
| publicationDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9044794-B2 |
| titleOfInvention |
Ultrasonic cleaning fluid, method and apparatus |
| abstract |
A cleaning fluid including dispersed gas avoids using ultrasonic energy to induce cavitation by subjecting a liquid containing dissolved gas to a pressure reduction in a bubble machine, to generate a gas/liquid dispersion. The cleaning fluid can be used to clean articles such as semiconductor wafers using a device that includes a holder and a vibrator for supplying ultrasonic or megasonic energy to the article. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11638937-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018033654-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10486202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10770315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11103898-B2 |
| priorityDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |